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Three Zones CVD Tube Furnace with 8.5" Quartz Tube & Slidable Flange (1100C) - GSL-1100X-8.5-III-SR

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GSL-1100X-8.5-SR-III is a three heating zone  8.5" O.D quartz tube furnace with slidable vacuum flange and multi-gas fed through SS tube for LPCVD processing, It is widely used for depositing a various film on wafers up to  6" under multi-gas condition. The tubing furnace's max working temperature is 1100°C, which is controlled by a precision controller with accuracy +/-1°C and 30 segments programmable.
Furnace structure
  • Double-wall steel casing with forced air cooling.
  • Two cooling fans inside to keep the temperature of outside case < 70 ºC
  • High purity alumina fibrous insulation for max energy saving
  • One sliding rail to support flange to load sample with ease
  • Three heating zone to achieve a longer constant temperature zone or a certain temperature gradient
Input voltage 220VAC Single phase
power 8kW
Fused quartz tube size
  • 8.5" O.D x 8.2" I.D x 51" Length
  •  One quartz tube is included, and the spare tube is available as an option ( click picture below to order )
Heating element NiCrAl Resistance Wire
Working Temperature
  • Max. heating temperature: 110 0°C
  • Continuous working temperature: 400 -1000°C
  • Max. heating/cooling rate: 10°C/min
Heating zone
  • Total heating zone length 900 mm (36")
  • Three zones: 300 mm + 300 mm + 300mm (12" per zone)
  • Constant temperature zone: 500 mm (if three zones are in the same temperature)
Temperature controller
  • Three precision temperature controller with PID function and 30 segments programmable
  • One extra temperature monitor is built in to shut down power when temperature out of control by accident
  • Double  K type thermal couple installed.
  • Temperature accuracy: +/-1°C
  • Software and PC interface module is available at extra cost
  • Eurotherm 3000 temp. controllers with +/- 0.1 oC accuracy are available upon request

         Optional: PC interface & software  Eurotherm temp. controllers

Vacuum Flange and gas feedthrough ports
  • Vacuum sealed stainless steel flanges with double high-temperature silicone O-ring are included to achieve high vacuum  (Usually 10-2 torr by mechanical pump and 10-4 torr by molecular pump ).  The vacuum pump is not included
  • The right-side flange is hinge-type and  KF25 vacuum port. KF25 Vacuum Right-Angle Valve and 1.2 meters long KF-40 Flexible Stainless Steel Vacuum Hose ( Bellows ),  are included.  One 1/4" diameter feedthrough port is built-in one flange for insert a thermal couple to calibrate furnace temperature. ( please order 36" length x 1/4"dia  K type
    thermal couple to insert the feedthrough at the related product or click underlined )
  • The left-side flange is installed on the slidable table to make moving easy.  There is five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases.  
  • One quartz block is included, which must put the right end of the tube to block heat radiation
  • The left-side flange is installed on the slidable table to make moving easy.  There is five stainless steel feed though pipes and needle valve are installed on the flanges to feed multi-CVD gases.  
  • 4 pcs quartz plate is built-in left side flange for the thermal block is built in left-side flange.    Please use a recirculating water chiller for water cooling  to save the environment ( click underlined to order )

  Right side flange      8"dia quartz block   Left side flange   Sliding flange                                       

Product dimension
  • Furnace:  1300 L x 680 W x 920 H,  mm
  • Sliding Table: 600mm L
  • Note: You must put the furnace and sliding table on a flat surface.  Must make good alignment between the sliding flange and furnace ( We ship sliding table and furnace separately
Net weight 354Kg
Shipping dimension 70" x 70" x 65"
Shipping weight 354Kg
Warranty One year limited warranty for electronic and mechanical part, excluding heating element and ceramic tube damaged by user
  • CE Certified
  • NRTL or CSA certification is available upon request
  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.2 bar / 3 psi / 0.02 MPa
  • Attention: Due to the high-pressure gas output from the gas cylinder, it is necessary to install the gas pressure regulator with it to reduce the output pressure, avoid overpressurizing the furance chamber and ensure a safe operation. Click here to learn the installation of a gas regulator.
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C  
  • The flow rate for gases should be limited to<200 SCCM (or 200ml/min) for reducing thermal shocks to the tube
  •    Upgrade to batch PECVD 

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