Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-4 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD

The OTF-1200X-III-HVC series furnace workstation consists of an OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and inputs the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.

Specifications

OTF-1200X-III series tube furnace	Casing	Double-layer steel casing with air cooling. Built-in thermostat to control Cooling running automatically when case > 55°C.
	Processing Tube	Material: Fused quartz tube One processing tube is included with the furnace. Please select the tube size in the option bar to update the price.
	Thermal Block Placement	Click here to choose a crucible
	Power	7KW
	Rated Voltage	AC 208-240V Single phase, 50/60Hz
	Heating Element	Fe-Cr-Al Alloy doped by Mo
	Working Temp.	Max. Heating Temp.: 1200°C Continuous Working Temp.: 1100°C
	Heat-up Rate	Heat-up rate: 1~20°C/min programmable
	Heating Zone Length	Total heating zone: 900mm   (300mm + 300mm + 300mm)
	Temp. Controller	Three precision temperature controllers to control three zones separately. PID automatic control with 30 steps programmable segments. Temperature accuracy: ±1°C Thermocouple: K type built inside the furnace
	Vacuum Seal	One pair of stainless steel vacuum flange with: - one mechanical pressure gauge - two needle valves - one KF-40 connector for the high vacuum station.
	Rated Voltage	AC 208-240V Single Phase, 50/60Hz
	Dimension	1100(L) x 450(W) x 670(H), mm
High Vacuum Station	Structure	Mobile cart size:  600 (L) x 600 (W) x 700(H), mm Max. Loading:       600 Lbs on top Molecular pump control Panel:   LCD digital Inside:   Pfeiffer vacuum pump  made in Germany A vacuum sensor is included
	Volume Flow Rate	Nitrogen   N2     33 L/s Helium     He     39 L/s   (2340L/minute) Hydrogen H2   32 L/s
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	<1E-8 mbar (without any leaking )
	Voltage & Power	110VAC or 220VAC, 110W
Mass Flow Gas Control	Structure	2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software LED display 4 channel MFC Made of 316 stainless steel with gas flow range as below: Controller 1: 0~100SCCM Controller 2: 1~199 SCCM Controller 3: 1~199 SCCM Controller 4: 1~499 SCCM 4 Channel gas goes through a Gas mixing tank: Φ80X120mm   Dimension: 600(L) x 745(W) x 700(H), mm
	Power	18W
	Rated Voltage	AC 208-240V, Single phase, 50/60Hz

 Shipping & Warranty

Shipping Dimension	Total Three Pallets   （ #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" ）
Shipping Weight	850 lbs
Optional	Click the picture below to order a bubbler or evaporator for CVD
Warranty	One year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance	CE Certified NRTL or CSA certification at extra cost. (please click marks below to learn details)
Notes	- Please click here to see our typical temperature profile calibration result at various temperatures. - In order to obtain accurate temperature inside the tube furnace, you need to calibrate temperature by yourself. Please click here to learn how. - How to set up a ceramic tube and vacuum flange for the MTI Tube furnace.
Warning Click here to learn the installation of a gas regulator	The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bar / 3 psi Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation.  The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
Operation Instructions