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Three Zones Tube Furnace (1200C) with High Vacuum Station (1.0E-4 torr) + 4 Channel MFC Gas Station for CVD - OTF-1200X-III-HVC-LD

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The OTF-1200X-III-HVC series furnace workstation consists of an OTF-1200X-III series three-zone tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes several kinds of gas together and inputs the mixed gas into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion, and other thermo-treatments under vacuum status and shielding gas protection. The furnace comes with a 4-channel digital LED display mas flow gas control station.


OTF-1200X-III series tube furnace Casing Double-layer steel casing with air cooling.
Built-in thermostat to control Cooling running automatically when case > 55°C.
Processing Tube Material: Fused quartz tube
One processing tube is included with the furnace.
Please select the tube size in the option bar to update the price.
Thermal Block Placement        Click here to choose a crucible
Power 7KW
Rated Voltage AC 208-240V Single phase, 50/60Hz
Heating Element Fe-Cr-Al Alloy doped by Mo
Working Temp. Max. Heating Temp.: 1200°C
Continuous Working Temp.: 1100°C
Heat-up Rate Heat-up rate: 1~20°C/min programmable
Heating Zone Length Total heating zone: 900mm   (300mm + 300mm + 300mm)
Temp. Controller
  • Three precision temperature controllers to control three zones separately.
  • PID automatic control with 30 steps programmable segments.
  • Temperature accuracy: ±1°C
  • Thermocouple: K type built inside the furnace
Vacuum Seal One pair of stainless steel vacuum flange with:
- one mechanical pressure gauge
- two needle valves
- one KF-40 connector for the high vacuum station.
Rated Voltage AC 208-240V Single Phase, 50/60Hz
Dimension 1100(L) x 450(W) x 670(H), mm
High Vacuum Station Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump  made in Germany
A vacuum sensor is included
Volume Flow Rate Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen H2   32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure <1E-8 mbar (without any leaking )
Voltage & Power 110VAC or 220VAC, 110W
Mass Flow Gas Control
Power 18W
Rated Voltage AC 208-240V, Single phase, 50/60Hz

 Shipping & Warranty


Shipping Dimension Total Three Pallets   ( #1: 60" x 45" x 40"    #2: 48" x 40" x 42"  #3: 48" x 40" x 42" )
Shipping Weight 850 lbs
Warranty One year limited warranty
(Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty,
please order the replacement at related products below.)
  • CE Certified
  • NRTL or CSA certification at extra cost. (please click marks below to learn details)
Notes - Please click here to see our typical temperature profile calibration result at various temperatures.
- In order to obtain accurate temperature inside the tube furnace, you need to calibrate temperature by yourself. Please click here to learn how.
How to set up a ceramic tube and vacuum flange for the MTI Tube furnace.
Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bar / 3 psi
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. 
  • The flow rate for gases should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
Operation Instructions

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