Tube Furnace w/ Hi-Vacuum (1E-4 torr) & 3 Channel Gas Flow Station for CVD - OTF-1200X-HVC3-series

The OTF-1200X-HVC series furnace workstation consists of an OTF-1200X series tube furnace, a precision mass flow gas control station, a high vacuum station, and other assembling parts. The max. working temperature of this workstation is 1200°C. The ultimate vacuum rate goes to 10^-4 torr (with our sealing assembly provided). The mass flow gas control station mixes three kinds of gas together and allows the mixed gas to flow into a fused quartz tube inside the furnace. It is competent for the experiments as CVD, Diffusion and other thermo-treatments under vacuum status and shielding gas protected.

SPECIFICATIONS:

OTF-1200X series tube furnace	Casing	Double-layer steel casing with air cooling. Built-in thermostat to control Cooling running automatically when case > 55°C.
	Processing Tube	Material: Fused quartz tube One processing tube is included with the furnace. Please contact MTI to specify the tube diameter.  Please select the tube size in the optional bar to update the price. Thermal block placement
	Power	2.5KW
	Rated Voltage	AC 208-240V Single phase, 50/60Hz
	Heating Element	Fe-Cr-Al Alloy doped by Mo
	Working Temp.	Max. Heating Temp.: 1200°C Continuous Working Temp.: 1100°C
	Heat-up Rate	Heat-up rate: 1~20°C/min programmable
	Heating Zone Length	Total heating zone: 440mm Constant Temp. Zone: 150mm (±1°C)
	Temp. Control	PID automatic control with 30 steps programmable segments. Temperature accuracy: ±1°C Thermocouple: K type built inside the furnace
	Vacuum Seal	One pair of stainless steel vacuum flange with:  one mechanical pressure gauge  two needle valves  one KF-25 connector for the high vacuum station.
	Power	100~110W
	Rated Voltage	AC 208-240V Single Phase, 50/60Hz
High Vacuum Station	Structure	Mobile cart size:  600 (L) x 600 (W) x 700(H), mm Max. Loading:       600 Lbs on top Molecular pump control Panel:   LCD digital Inside:   Pfeiffer vacuum pump  made in Germany Vacuum sensor is included
	Volume Flow Rate	Nitrogen   N2     33 L/s Helium      He     39 L/s   (2340L/minute) Hydrogen H2   32 L/s
	Working Range	From 1000 mbar to <1E-7 mbar
	Ultimate Pressure	<1E-8 mbar (without any leaking )
Mass Flow Gas Control EQ-GSL-LCD	Structure	Made of 316 stainless steel valve Gas mixing tank: Φ80X120mm   600mm(L) x 745mm(W) x 700mm(H) 6" color touch screen control panel to make parameter setting at easy. Touchscreen Control and PC remote switchable.
	Power	23W per channel
	Rated Voltage	AC 220V/50Hz Single phase

Temperature Controller	FA-YD518P-AG temperature controller is included. Proportional–integral–derivative control (PID control) and auto-tune function 30 segments programmed with ramping, cooling and dwelling steps Built-in over-temperature alarm and thermocouple failure alarm +/- 1 ºC temperature control accuracy Default DB9 PC communication port
Temperature controller (optional)	MTS02-Y Temperature control software kit (for YD518P series controllers) + 15" laptop package is available at the options bar. Click for detailed information about the MTS02-Y software kit.  You may upgrade the temperature controller to the Eurotherm 3504 Temperature Controller which is fully compatible with LabVIEW. This package includes a Eurotherm 3504 programmer, a communication cable (RS485 - USB), and a software CD. Click the pic below to view the full spec of Eurotherm 3004 temperature controller.
Optional	2-9 Channel Gas Control System with PLC Touch Panel and PC Operation Software is available upon request at extra cost Click the picture below - left to order bubbler or evaporator for CVD
Warning Click here to learn the installation of a gas regulator	The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.2 bars  Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator. The flow rate for gases should be limited to < 200 ml/min for reducing thermal shocks to the tube Vacuum pressures may only be safely used up to 1000°C
Warranty	One year limited warranty with lifetime support (Consumable parts such as processing tubes, O-rings are not covered by the warranty, please order replacements at related products below.)
Compliance	CE Certified NRTL or CSA certification is available upon request at extra cost.
Operation Instructions