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Two Zone IR-Heating RTP Tube Furnace (4'' ID ) with Sliding Sample Holders -OTF-1200X-IR-IISL

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OTF-1200X-IR-IISL is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. It is capable of achieving a maximum heating rate of 50 °C/s  and a cooling rate of 117 °C/min. The furnace is designed for growing two-dimension and superconducting materials via hybrid physical-chemical vapor deposition (HPCVD), where one heating zone is used as a solid evaporating source and another zone is for vapor deposition. The precision temperature controllers are able to set up programmable heating and cooling profiles with up to 30 temperature segments. 


Furnace Features
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
  • Heated by shortwave IR tube lamps for fast heating
  • Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD
  • Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions. 
  • A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional).
  • Vacuum flanges and the digital vacuum gauge are installed for immediate use.   
  • AC 208-240V,  single-phase, 50/60 Hz
  • MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A).
Heating Element
  • 16 pcs 1.5 kW halogen heating tubes,  ( OD = 13.3 mm,  L= 390 mm )
  • Standard working life: 2000 hrs.  ( depends on the heating rate )
  • The halogen light tube is consumable.  Please click the picture left to order spare.
Max. Temperature
  • 900°C max (< 10 minutes )
  • 800°C (< 30 minutes )
  • 600°C (continuous operation)
Temperature Accuracy
  • ± 1°C
Max. Heating Rate
  • RT ~ 800ºC: 50 ºC/s
  • 800 ºC ~ 900 ºC: 10 ºC/s
Max. Cooling Rate
  • 60 ºC/min under 200 mTorr environment
  • 117 ºC/min under atmospheric pressure
  • 10 °C/min slowest
Process Tube Size
  • High purity fused quartz tube
  • Φ110 (OD) × Φ106 (ID)× 740 (L) mm
Sliding Rails 
  • Dual sliding rails made of Cr plated steel
  • Sliding rail length: 400 mm
  • Two K type, 1/4" Dia x 24" length   

Temperature Controller  

  • Two temperature controllers for controlling two zones independently via SCR
  • PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in thermocouple broken protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • ± 1 ºC temperature accuracy for dwelling.
  • RS485 Communications Port.
  • PC Control:  
    • An MTS-02 control module is included for PC control on this furnace.
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here

Vacuum Flanges

  • SS water-cooled flanges on both sides. 
  • Left flange:
    1/4" thermocouple feedthrough
    1/4'' tube fitting
  • Right flange:
    KF 25 port with a right angle gate valve for vacuum pump
    Needle valve with barb fitting as a venting port
  • A digital vacuum gauge is included
  • Retractable bellow design is optional on the left flange, which allows sample flash heating or retrieving for fast cooling under inert gas. 

Vacuum Level 

  •  Limited by the vacuum pump
    • 10^-2 torr can be achieved by the mechanical pump
    • 10^-4 torr can be reached by molecular pump
  • The pump is not included. ( please click the picture below to order )

Water Chiller  (optional)

  • Cooling water is required for the flange set.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below).



Net Weight

  • ~180 Kg

Shipping Weight

  • 500 lbs


  • One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The features above are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note:  The software is only compatible with MTI’s Yudian Temperature Controller


  • CE Certified
  • NRTL(UL61010) or CSA certification is available upon request at extra cost. ( please click marks below to learn details )


Application Notes

Click here to learn the installation of a gas regulator

  • Tube furnaces with quartz tubes are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure).
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C
  • Click here to learn how to set up a quartz/ ceramic tube and vacuum flange for MTI Tube furnace.
  • Quartz tubes should be replaced after every 10th use to ensure the best performance. 
  • Samples should never be placed on the tube directly; please order crucibles and boats from here.
  • After CVD, the graphene must be transferred from the metal catalyst to another substrate for most applications. By using the graphene transfer tape, the residue can below.

Operation Instructions


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