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Ultrasonic Spin-Spray Coater (300-3000 rpm, 12" Wafer Max) - VTC-300USS

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VTC-300USS is a cost-effective ultrasonic Spin-Spray Coater for liquid-phase, ultra-uniform coating process on a large substrate up to 12". The system consists of (1) a 12" spin coater with the vacuum chuck, (2) compressed air-assisted ultrasonic spray nozzle mounted on a swing arm, (3) a heatable syringe pump, and (4) a heat lamp system for substrate heating.  It also can be considered as a atmosphere mist CVD system



  • Combine the benefits of both spin and spray, enabling dense and uniform liquid-phase coating onto a large substrate
  • Applications include low-temperature precipitation (e.g., for RF/microwave ferrites deposition), polymer coating, powder and composite material coating, and coating on a patterned / uneven substrate
  • The system also works on spin alone and spray alone modes
Spin Coater
  • Vacuum chuck with adjustable substrate holders for holding flat substrate up to 12" diameter or 8" square
  • One oil-less pump for the vacuum chuck is included and controlled by the spin coater
  • Spin speed: 300 - 3000 rpm adjustable
  • For safety concerns, the speed is recommended to be limited to 2000 rpm for wafers larger than 8"
 Spray Nozzle
  • One ultrasonic generator with two ultrasonic sprays nozzles with compressed air shaper is included
  • Two spray nozzles with the KF-25 adapter are included. (Click the first picture from right to see details)
    • One cylindrical type -- narrower spray ~20 mm diameter
    • One cone type -- wider spray ~40 mm diameter
  • Recommended compressed air pressure for the aqueous solution: ~2 psi
  • One flow meter is integrated for regulating and monitoring the compressed airflow
  • Fluid viscosity range: 1 - 50 mPa·s (cP)
  • One swing arm for mounting ultrasonic spray head is built-in with adjustable speed and movement range
  • Low-cost compressive gas atomizing nozzle is available upon request 
  •                     (optional gas nozzle)
Heatable Syringe Pump
  • A heatable syringe pump with LCD touch screen control is included for delivering liquid to the ultrasonic nozzle
  • One 50 mL syringe is included for immediate use. The unit can accommodate syringe with 0.4 - 30 mm diameter
  • Pumping rate: 0.1 - 45 mm/min adjustable (0.08 mL/min - 35 mL/min for the included 50 mL syringe)
  • Flexible Polyimide heater with 30 segments programmable temperature controller is built-in for heating up to 75 °C
Heat Lamp and Control
  • Dual heat lamps (1000 W max power. Up to 80 ºC) with thermocouple and temperature controller can be ordered at extra cost for the heating substrate by radiation (up to 65 ºC with 12" metal substrate) 
  • MTI strongly suggests you place the spin-spray coater inside a fume hood for health and safety concerns. 
  • Compressive gas atomizing spray nozzle is  available for NRTL certification (Pic. 2)
  • Customized Multi spray head is available upon request ( pic 3 )
  •  PIC 1        Pic. 2                Pic. 3
Utility Requirement
  • Power: 208 - 240 VAC, 50/60 Hz, 3000 W in total
  • Gas: ~2 psi compressed air for the ultrasonic nozzle. Air compressor is also available for order at MTI
  • Attention: If a gas cylinder is used instead of an air compressor(pic2), a two-stage pressure regulator(pic1) must be installed on the gas cylinder to limit the pressure within the required working range for safe operation. Click here to learn the installation of a gas regulator.
  pic1                pic2
Net Weight
  • 160 lbs
  • CE Certified
  • NRTL certification is only available with compressive gas atomizing spray nozzle 
  • One year limited with lifetime support
  • Rusting and damage due to improper storage condition or maintenance are not covered by warranty
Operation Manual & Video
Application Notes

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