Undoped AlN Template on 2" Silicon ( Si , N type ) 2"x 200 nm

AlN  Template on Silicon is made by a PVDNC method.  AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.

Specifications

• Useful area: 90%
• Nominal AlN thickness: 200nm ± 5%, one side coated, undoped AlN film
• Front Surface: As-grown
• Back surface: Silicon as received
• AlN orientation: C-plane (00.1)
• Macro Defect Density: <5/cm^2
• Wafer base: Silicon [111]N type,  2" dia x0.5 mm, Resistivity: <5 ohm-cm, one side polished