Undoped AlN Template on 2" Silicon (Si N type) 2"x 500 nm - FmAlNonSiPc50D05C1FT500nmUS

AlN   Template on Silicon is made by a PVDNC method.   AlN template on Silicon is a cost effective way to replace AlN single crystal substrate.

Specifications

• Useful area: 90%
• Nominal AlN thickness: 500nm ±10%, one side coated, undoped AlN film
• Front Surface: <1nm RMS,    as-grown
• Back surface: silicon  N-type
• AlN orientation: C-plane (00.1)
• Macro Defect Density: <1/cm^2
• Wafer base: Silicon [111]N type,  2" dia x0.5 mm, , one side polished