Vacuum Chucks - Embedded Vacuum

Laurell Technologies - Vacuum Chucks (Embedded Vacuum)

Embeding substrates into the chuck’s face is done for two reasons: alignment and uniformity or possibly both reasons. Thick round substrates are centered precisely every time, making it virtually impossible to eject during rotation, even if vacuum hold-down fails. A thick square substrate coating is uniform, even at the edges and corners, being fooled into thinking it is round like the chuck, because it is such close proximity.

Note: Minimum thickness is 0.5mm.

Laurell® is a registered trademark of Laurell Technologies Corporation

EDC