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KEMSTREAM

VAPBOX 300

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Description

 

Kemstream - VAPBOX 300

DLI (Direct Liquid Injection) CVD/ALD vaporizer

 

Thermal Performances

1 heating zone and 1 thermocouple

400W

 220°C max

 

Fittings

 Vapors outlet: 1/4" VCR M or 1/2" VCR M

 Liquid inlet: swagelok 1/8" (recommended), 1/8" VCR F also available

 Carrier gas inlet: 1/4" VCR F (standard), M also available

 

Size and weight (without the ICU)

Total : 282mm (H) x 170mm (W) x 187mm (D)

 Weight: 6kg

 Vaporization chamber volume: 300cm 

 

 

Premier Solutions Pte Ltd / Kemstream - VAPBOX 300 (Vaporizer)

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