WS-1000 Wet Station for Spin Coaters

About the WS-1000

The Laurell WS-1000 Series Spin-Process Stations allow a fully configured and tested module to be constructed and shipped complete — requiring only the minimum of installation time. Easy to load and operate — everything is in convenient reach to the operator.

Dimensions

48" W x 43 3/8" D x 74 1/4" H
(121.9cm W x 110.04cm D x 188.60cm H)

Typical Processes

including, but not limited to:

• Coating
• Etching
• Developing — Aqueous / Solvent
• Cleaning — Aqueous / Solvent
• Yes, Sulfuric / Peroxide (in situ mixing)
• Yes, HBr
• Temperature-controlled Developing
• Rinsing / Drying

Features

• All-polypropylene construction (self-extinguishing available, see below*)
• Accommodates the installation of any Laurell spin processor
• Perforated wet-deck (easily removable)
• Wet plenum
• Exhaust Plenum with gauge
• Isolated component / drawer below for heaters, pumps, vessels...

Options

• Touch Screen Control Interface
  Watch the    Laurell Touch Demo Video
• Processor exhaust interlock (standard on EDC™ models)
• Chemical Heating
• Through pressure vessel material stirring (magnetic)
• Rinse to resistivity
• Drain diverter(s)
• Vacuum loading wand
• Wafer cassette stand
• Leak detection
• Light towers

*Advanced materials available if required

Flame-Retardant Option

Best WS-1000-CP7-D — a polypropylene formulation whose flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristics and burn-through. This advanced material also meets or exceeds test standards for low smoke generation and minimal toxic by-products.

Need a smaller (2’), less elaborate station? See WS-1000MH