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WS-1000 Wet Station for Spin Coaters

WS-1000 Wet Station for Spin Coaters

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Laurell WS-1000 Wet Station Laurell WS-1000 Wet Station Laurell WS-1000 Wet Station Laurell WS-1000 Wet Station Laurell WS-1000 Wet Station Laurell WS-1000 Wet Station
About the WS-1000

The Laurell WS-1000 Series Spin-Process Stations allow a fully configured and tested module to be constructed and shipped complete — requiring only the minimum of installation time. Easy to load and operate — everything is in convenient reach to the operator.


48" W x 43 3/8" D x 74 1/4" H
(121.9cm W x 110.04cm D x 188.60cm H)

Typical Processes

including, but not limited to:

  • Coating
  • Etching
  • Developing — Aqueous / Solvent
  • Cleaning — Aqueous / Solvent
  • Yes, Sulfuric / Peroxide (in situ mixing)
  • Yes, HBr
  • Temperature-controlled Developing
  • Rinsing / Drying
  • All-polypropylene construction (self-extinguishing available, see below*)
  • Accommodates the installation of any Laurell spin processor
  • Perforated wet-deck (easily removable)
  • Wet plenum
  • Exhaust Plenum with gauge
  • Isolated component / drawer below for heaters, pumps, vessels...
  • Touch Screen Control Interface
    Watch the    Laurell Touch Demo Video
  • Processor exhaust interlock (standard on EDC™ models)
  • Chemical Heating
  • Through pressure vessel material stirring (magnetic)
  • Rinse to resistivity
  • Drain diverter(s)
  • Vacuum loading wand
  • Wafer cassette stand
  • Leak detection
  • Light towers

*Advanced materials available if required

Flame-Retardant Option

Best WS-1000-CP7-D — a polypropylene formulation whose flame retardant characteristics meet the most rigorous FMRC 4910 testing standards for most aspects of flame retardation, self-extinguishing characteristics and burn-through. This advanced material also meets or exceeds test standards for low smoke generation and minimal toxic by-products.

Need a smaller (2’), less elaborate station? See WS-1000MH

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