TCVD-DRF100CA

• Size (mm): 2300(W) x 1770(H) x 750(D)
• Up to 10 gases 3 MO sources for gas-phase synthesis.
• Motor-controlled movable heater for fast heating cooling (patented).
• Fully computer-controlled programmable recipes.
• TCVD100 platform: Proven performance for ~100 systems for more than 5 years.
• Invited training for full sample preparation processes from synthesis, etching, transfer.
• Supply of high-quality source materials.
• 1 year warranty included (2 year extended warranty available)
• CVD chambers connected to a Glove Box. Free from air exposure.
• *Price will be determined after consultation.
• (Different customization from the standard parts will affect the overall price.)

Specifications

1. Thermal CVD Auto Operation system - 2channel operation
2. Both End chamber(Stainess) - All parts cooling by water
3. Glove box unit (Sample Auto-loading and Anti-contamination)
4. Quartz Main chamber
5. Gas control unit ( Mass flow controller) - 3channel standard
6. 340liter/min Oil rotary pump
7. Pneumatic On/off valve with Auto pressure control Throttle valve
8. Programmable Temperature controller
9. High Temperature Furnace(Max1200℃)
10. Rapid Cooling system by furnace moving
11. Atmospheric and Vacuum Processing
12. Anti-contamination system by inner tube
13. Vacuum gauge unit(Capacitance/Convectron)
14. 1 year warranty
15. On-site install and tranning
16. System Program (Auto processing system)
17. Safety Cover (Connected exhaust system)
18. High Vacuum processing (Pump/Gauge/valve unit)
19. RF plasma (ICP type)

Options

1. Max temp 1500℃ Furnace by SIC source
2. Rapid thermal processing furnace by IR lamp source
3. MF power induction heating process Max temp 1600℃
4. MFC(Mass flow controller) addtion total 12channel
5. Dry vacuum pump ( Scroll / booster / industry)
6. Safety interlock system(Water / Air/gas leak)
7. Tungsten filament gas source cracking
8. Additional Furnace for source evaporation
9. High Vacuum processing option (Pump/Gauge/valve unit)
10. Source delivery system ( Bubbler / Gas / Solid )
11. System Utility ( Chiller / scrubber / gas cabinet )
12. System Co-operation( 2system simultaneous operation)

Consumable Parts

1. K-type Thermocouple (Option : R-type)
2. Furnace heating element (Furnace repair)
3. Vacuum sensor
4. Oil in Rotary Oil Pump
5. O-ring
6. Quartz tube

Facility Requirements