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  • Size (mm): 2300(W) x 1770(H) x 750(D)
  • Up to 10 gases 3 MO sources for gas-phase synthesis.
  • Motor-controlled movable heater for fast heating cooling (patented).
  • Fully computer-controlled programmable recipes.
  • TCVD100 platform: Proven performance for ~100 systems for more than 5 years.
  • Invited training for full sample preparation processes from synthesis, etching, transfer.
  • Supply of high-quality source materials.
  • 1 year warranty included (2 year extended warranty available)
  • CVD chambers connected to a Glove Box. Free from air exposure.
  • *Price will be determined after consultation.
  • (Different customization from the standard parts will affect the overall price.)


  1. Thermal CVD Auto Operation system - 2channel operation
  2. Both End chamber(Stainess) - All parts cooling by water
  3. Glove box unit (Sample Auto-loading and Anti-contamination)
  4. Quartz Main chamber
  5. Gas control unit ( Mass flow controller) - 3channel standard
  6. 340liter/min Oil rotary pump
  7. Pneumatic On/off valve with Auto pressure control Throttle valve
  8. Programmable Temperature controller
  9. High Temperature Furnace(Max1200℃)
  10. Rapid Cooling system by furnace moving
  11. Atmospheric and Vacuum Processing
  12. Anti-contamination system by inner tube
  13. Vacuum gauge unit(Capacitance/Convectron)
  14. 1 year warranty
  15. On-site install and tranning
  16. System Program (Auto processing system)
  17. Safety Cover (Connected exhaust system)
  18. High Vacuum processing (Pump/Gauge/valve unit)
  19. RF plasma (ICP type)


  1. Max temp 1500℃ Furnace by SIC source
  2. Rapid thermal processing furnace by IR lamp source
  3. MF power induction heating process Max temp 1600℃
  4. MFC(Mass flow controller) addtion total 12channel
  5. Dry vacuum pump ( Scroll / booster / industry)
  6. Safety interlock system(Water / Air/gas leak)
  7. Tungsten filament gas source cracking
  8. Additional Furnace for source evaporation
  9. High Vacuum processing option (Pump/Gauge/valve unit)
  10. Source delivery system ( Bubbler / Gas / Solid )
  11. System Utility ( Chiller / scrubber / gas cabinet )
  12. System Co-operation( 2system simultaneous operation)

Consumable Parts

  1. K-type Thermocouple (Option : R-type)
  2. Furnace heating element (Furnace repair)
  3. Vacuum sensor
  4. Oil in Rotary Oil Pump
  5. O-ring
  6. Quartz tube

Facility Requirements

Electrical power 220VAC 1ph 75A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 3/8" lok fitting
cooling water flow Air temp 5~7liter/min
cooling water pressure 0.1~0.2Mpa
Safety exhaust size 6 mm one touch tube
Gas input pressure 40ps
Gas port 4ch standard (Option 2ch Expansion)
Gas port size 1/4"lok fitting
Pump exhaust NW25
Rotary pump capacity 340liter/min
Vent 1/4"lok fitting

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