Phone

(+65) 6284 3818

Email

sales@premier-sols.com

Enquriy
TCVD-DRF100CA

TCVD-DRF100CA

0.0/5 rating (0 votes)

Description

Features
  • Size (mm): 2300(W) x 1770(H) x 750(D)
  • Up to 10 gases 3 MO sources for gas-phase synthesis.
  • Motor-controlled movable heater for fast heating cooling (patented).
  • Fully computer-controlled programmable recipes.
  • TCVD100 platform: Proven performance for ~100 systems for more than 5 years.
  • Invited training for full sample preparation processes from synthesis, etching, transfer.
  • Supply of high-quality source materials.
  • 1 year warranty included (2 year extended warranty available)
  • CVD chambers connected to a Glove Box. Free from air exposure.
  • *Price will be determined after consultation.
  • (Different customization from the standard parts will affect the overall price.)

Specifications

  1. Thermal CVD Auto Operation system - 2channel operation
  2. Both End chamber(Stainess) - All parts cooling by water
  3. Glove box unit (Sample Auto-loading and Anti-contamination)
  4. Quartz Main chamber
  5. Gas control unit ( Mass flow controller) - 3channel standard
  6. 340liter/min Oil rotary pump
  7. Pneumatic On/off valve with Auto pressure control Throttle valve
  8. Programmable Temperature controller
  9. High Temperature Furnace(Max1200℃)
  10. Rapid Cooling system by furnace moving
  11. Atmospheric and Vacuum Processing
  12. Anti-contamination system by inner tube
  13. Vacuum gauge unit(Capacitance/Convectron)
  14. 1 year warranty
  15. On-site install and tranning
  16. System Program (Auto processing system)
  17. Safety Cover (Connected exhaust system)
  18. High Vacuum processing (Pump/Gauge/valve unit)
  19. RF plasma (ICP type)

Options

  1. Max temp 1500℃ Furnace by SIC source
  2. Rapid thermal processing furnace by IR lamp source
  3. MF power induction heating process Max temp 1600℃
  4. MFC(Mass flow controller) addtion total 12channel
  5. Dry vacuum pump ( Scroll / booster / industry)
  6. Safety interlock system(Water / Air/gas leak)
  7. Tungsten filament gas source cracking
  8. Additional Furnace for source evaporation
  9. High Vacuum processing option (Pump/Gauge/valve unit)
  10. Source delivery system ( Bubbler / Gas / Solid )
  11. System Utility ( Chiller / scrubber / gas cabinet )
  12. System Co-operation( 2system simultaneous operation)

Consumable Parts

  1. K-type Thermocouple (Option : R-type)
  2. Furnace heating element (Furnace repair)
  3. Vacuum sensor
  4. Oil in Rotary Oil Pump
  5. O-ring
  6. Quartz tube

Facility Requirements

Electrical power 220VAC 1ph 75A
Compressed air 0.5~0.6Mpa
Compressed air input size 6 mm one touch fitting
Cooling water in/out 3/8" lok fitting
cooling water flow Air temp 5~7liter/min
cooling water pressure 0.1~0.2Mpa
Safety exhaust size 6 mm one touch tube
Gas input pressure 40ps
Gas port 4ch standard (Option 2ch Expansion)
Gas port size 1/4"lok fitting
Pump exhaust NW25
Rotary pump capacity 340liter/min
Vent 1/4"lok fitting

Share this product

Please type your full name.
Invalid Input
Invalid Input
Invalid Input
Invalid email address.
Invalid Input
Invalid Input
Invalid Input
Invalid Input

Register for new product information:    

Premier Solutions (PS) Pte Ltd Singapore

Please publish modules in offcanvas position.