TCVD-RF100CA

• Size (mm) : 2300(W) x 1770(H) x 750(D)
• Up to 10 gases 3 MO sources for gas-phase synthesis.
• Motor-controlled movable heater for fast heating cooling (patented).
• Fully computer-controlled programmable recipes.
• TCVD100 platform : Proven performance for ~100 systems for more than 5 years.
• Invited training for full sample preparation processes.
• *Price will be determined after consultation.
• (Different customization from the standard parts will affect the overall price.)

Specifications

1. Thermal CVD Semi-auto Operation system
2. Both End chamber(Stainess) - All parts cooling by water
3. Quartz Main chamber
4. Gas control unit ( Mass flow controller) - 3channel standard
5. 340liter/min Oil rotary pump
6. Pneumatic On/off valve with Auto pressure control Throttle valve
7. Programmable Temperature controller
8. High Temperature Furnace(Max1200℃)
9. Rapid Cooling system by furnace moving
10. Atmospheric and Vacuum Processing
11. Anti-contamination system by inner tube
12. Vacuum gauge unit(Capacitance/Convectron)
13. 1 year warranty
14. On-site install and training
15. System Program ( Auto processing system)
16. Safety Cover ( Connected exhaust system )
17. High Vacuum processing (Pump/Gauge/valve unit)
18. RF plasma ( ICP type )

Options

1. Max temp 1500℃ Furnace by SIC source
2. Rapid thermal processing furnace by IR lamp source
3. MF power induction heating process Max temp 1600℃
4. MFC(Mass flow controller) addtion total 12channel
5. Dry vacuum pump ( Scroll / booster / industry)
6. Safety interlock system(Water / Air/gas leak)
7. Tungsten filament gas source cracking
8. Additional Furnace for source evaporation
9. High Vacuum processing option (Pump/Gauge/valve unit)
10. Source delivery system ( Bubbler / Gas / Solid )
11. System Utility ( Chiller / scrubber / gas cabinet )

Consumable Parts

• K-type Thermocouple (Option : R-type)
• Furnace heating element (Furnace repair)
• Vacuum sensor
• Oil in Rotary Oil Pump
• O-ring
• Quartz tube

Facility Requirements