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(+65) 6284 3818

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sales@premier-sols.com

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Cluster & Custom Deposition Systems

Cluster & Custom Deposition Systems

A cluster tool utilizes a central robotic distribution chamber to connect multiple process (PVD, ALD) and metrology chambers while enabling substrate transfer under vacuum. A custom system is designed to meet your specific needs for a vacuum process solution.

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OCTOS™ – Automated Thin Film Deposition Cluster Tool

OCTOS™ – Automated Thin Film Deposition Cluster Tool

The Kurt J. Lesker Company® OCTOS cluster tools are proven R&D and pilot production systems for in vacuum transfer between multiple process chambers.

Custom Thin-Film Deposition Systems & Capabilities

Custom Thin-Film Deposition Systems & Capabilities

We manufactured our first thin-film vacuum deposition system over 20 years ago at our U.S. headquarters in Pittsburgh, Pa. Hundreds of systems later our proven Process Equipment Division, with engineering, manufacturing, and clean-room assembly areas in the U.S. and U.K., are positioned to offer custom PVD and CVD deposition systems designed and manufactured to exacting specifications for your specific process application.

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